Authors:
Kleineberg, U
Haindl, G
Hutten, A
Reiss, G
Gullikson, EM
Jones, MS
Mrowka, S
Rekawa, SB
Underwood, JH
Citation: U. Kleineberg et al., Microcharacterization of the surface oxidation of Py/Cu multilayers by scanning X-ray absorption spectromicroscopy, APPL PHYS A, 73(4), 2001, pp. 515-519
Authors:
Lim, YC
Westermalbesloh, T
Aschentrup, A
Wehmeyer, O
Haindl, G
Kleineberg, U
Heinzmann, U
Citation: Yc. Lim et al., Fabrication and characterization of EUV multilayer mirrors optimized for small spectral reflection bandwidth, APPL PHYS A, 72(1), 2001, pp. 121-124
Authors:
Anopchenko, A
Jergel, M
Majkova, E
Luby, S
Holy, V
Aschentrup, A
Kolina, I
Lim, YC
Haindl, G
Kleineberg, U
Heinzmann, U
Citation: A. Anopchenko et al., Effect of substrate heating and ion beam polishing on the interface quality in Mo/Si multilayers - X-ray comparative study, PHYSICA B, 305(1), 2001, pp. 14-20
Authors:
Dreeskornfeld, L
Segler, R
Haindl, G
Wehmeyer, O
Rahn, S
Majkova, E
Kleineberg, U
Heinzmann, U
Hudek, P
Kostic, I
Citation: L. Dreeskornfeld et al., Reactive ion etching with end point detection of microstructured Mo/Si multilayers by optical emission spectroscopy, MICROEL ENG, 54(3-4), 2000, pp. 303-314
Authors:
Hamelmann, F
Haindl, G
Schmalhorst, J
Aschentrup, A
Majkova, E
Kleineberg, U
Heinzmann, U
Klipp, A
Jutzi, P
Anopchenko, A
Jergel, M
Luby, S
Citation: F. Hamelmann et al., Metal oxide/silicon oxide multilayer with smooth interfaces produced by insitu controlled plasma-enhanced MOCVD, THIN SOL FI, 358(1-2), 2000, pp. 90-93
Authors:
Sundermann, M
Hartwich, J
Rott, K
Meyners, D
Majkova, E
Kleineberg, U
Grunze, M
Heinzmann, U
Citation: M. Sundermann et al., Nanopatterning of Au absorber films on Mo/Si EUV multilayer mirrors by STMlithography in self-assembled monolayers, SURF SCI, 454, 2000, pp. 1104-1109
Authors:
Kleineberg, U
Menke, D
Hamelmann, F
Heinzmann, U
Schmidt, O
Fecher, GH
Schoenhense, G
Citation: U. Kleineberg et al., Photoemission microscopy with microspot-XPS by use of undulator radiation and a high-throughput multilayer monochromator at BESSY, J ELEC SPEC, 103, 1999, pp. 931-936
Authors:
Le, ZC
Dreeskornfeld, L
Rahn, S
Segler, R
Kleineberg, U
Heinzmann, U
Citation: Zc. Le et al., Application of reactive ion etching to the fabrication of microstructure on Mo/Si multilayer, CHIN PHYS L, 16(9), 1999, pp. 665-666
Authors:
Hartwich, J
Sundermann, M
Kleineberg, U
Heinzmann, U
Citation: J. Hartwich et al., STM writing of artificial nanostructures in alkanethiol-type self-assembled monolayers, APPL SURF S, 145, 1999, pp. 538-542
Authors:
Yamazaki, T
Gullikson, E
Miyata, N
Koike, M
Harada, Y
Mrowka, S
Kleineberg, U
Underwood, JH
Yanagihara, MM
Sano, K
Citation: T. Yamazaki et al., Comparison of mechanically ruled versus holographically varied line-spacing gratings for a soft-x-ray flat-field spectrograph, APPL OPTICS, 38(19), 1999, pp. 4001-4003