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Results:
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Results: 4
Patterning performance of EB-X3 x-ray mask writer
Authors:
Ohki, S Watanabe, T Takeda, Y Morosawa, T Saito, K Kunioka, T Kato, J Shimizu, A Matsuda, T Tsuboi, S Aoyama, H Watanabe, H Nakayama, Y
Citation:
S. Ohki et al., Patterning performance of EB-X3 x-ray mask writer, J VAC SCI B, 18(6), 2000, pp. 3084-3088
EB-X3: New electron-beam x-ray mask writer
Authors:
Morosawa, T Saito, K Takeda, Y Kunioka, T Shimizu, A Kato, J Matsuda, T Kuriyama, Y Nakayama, Y Matsui, Y
Citation:
T. Morosawa et al., EB-X3: New electron-beam x-ray mask writer, J VAC SCI B, 17(6), 1999, pp. 2907-2911
XY stage driven by ultrasonic linear motors for the electron-beam x-ray mask writer EB-X3
Authors:
Kunioka, T Takeda, Y Matsuda, T Shimazu, N Nakayama, Y
Citation:
T. Kunioka et al., XY stage driven by ultrasonic linear motors for the electron-beam x-ray mask writer EB-X3, J VAC SCI B, 17(6), 1999, pp. 2917-2920
Electron beam writing system for X-ray masks
Authors:
Shimazu, N Morosawa, T Saito, K Kunioka, T Takeda, Y Watanabe, T
Citation:
N. Shimazu et al., Electron beam writing system for X-ray masks, NTT REVIEW, 10(6), 1998, pp. 65-69
Risultati:
1-4
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