Authors: Babin, S Kuzmin, IY Mack, CA

Citation: S. Babin et al., Comprehensive simulation of electron-beam lithography processes using PROLITH/3D and TEMPTATION software tools, MICROEL ENG, 57-8, 2001, pp. 343-348

Authors: Babin, S Hartmann, H Kuzmin, IY

Citation: S. Babin et al., Simulation and measurement of resist heating in multipass exposure using a50 kV variably shaped beam system, MICROEL ENG, 46(1-4), 1999, pp. 231-234

Authors: Babin, S Kuzmin, IY

Citation: S. Babin et Iy. Kuzmin, Experimental verification of the TEMPTATION (temperature simulation) software tool, J VAC SCI B, 16(6), 1998, pp. 3241-3247