Authors:
Shin, S
Kye, JI
Pi, UH
Khim, ZG
Hong, JW
Park, SI
Yoon, S
Citation: S. Shin et al., Effect of photoenhanced minority carriers in metal-oxide-semiconductor capacitor studied by scanning capacitance microscopy, J VAC SCI B, 18(6), 2000, pp. 2664-2668