Authors: LABELLE CB LIMB SJ GLEASON KK

Citation: Cb. Labelle et al., ELECTRON-SPIN-RESONANCE OF PULSED PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITED FLUOROCARBON FILMS, Journal of applied physics, 82(4), 1997, pp. 1784-1787

Authors: LABELLE CB MAYNARD HL LEE JTC

Citation: Cb. Labelle et al., METAL STACK ETCHING USING A HELICAL RESONATOR PLASMA, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(4), 1996, pp. 2574-2581

Authors: LIMB SJ LABELLE CB GLEASON KK EDELL DJ GLEASON EF

Citation: Sj. Limb et al., GROWTH OF FLUOROCARBON POLYMER THIN-FILMS WITH HIGH CF2 FRACTIONS ANDLOW DANGLING BOND CONCENTRATIONS BY THERMAL CHEMICAL-VAPOR-DEPOSITION, Applied physics letters, 68(20), 1996, pp. 2810-2812