Authors: LEE MK YANG CN LIN CH LEI BH

Citation: Mk. Lee et al., THE PROTRUSION OF LIQUID-PHASE OXIDE DEPOSITION ON PATTERNED SILICON-WAFER WITH SILICON-NITRIDE AS MASK, JPN J A P 1, 37(2), 1998, pp. 423-425

Authors: LEE MK LIN CH LEI BH YANG CD

Citation: Mk. Lee et al., IMPROVEMENT OF EFFECTIVE CHARGES IN OXYNITRIDE PREPARED BY LIQUID-PHASE DEPOSITION ON SILICON, JPN J A P 2, 37(1AB), 1998, pp. 53-54