Authors: RYBKIN VV KUVALDINA EV LYUBIMOV VK

Citation: Vv. Rybkin et al., COMPARATIVE-ANALYSIS OF ETCHING OF POLYIMIDE FILMS IN PLASMAS IN O2 AND O2-CF4 MIXTURES, High energy chemistry, 27(1), 1993, pp. 78-82

Authors: BULANKOV NI KUVALDINA EV LYUBIMOV VK RYBKIN VV

Citation: Ni. Bulankov et al., KINETIC FEATURES OF THE ETCHING OF SEVERAL POLYIMIDE MATERIALS IN OXYGEN PLASMAS, High energy chemistry, 26(5), 1992, pp. 384-387

Authors: KUVALDINA EV LYUBIMOV VK RYBKIN VV

Citation: Ev. Kuvaldina et al., RATE-CONSTANT AND PROBABILITY OF INTERACTION OF ATOMIC OXYGEN WITH POLYIMIDE FILMS, High energy chemistry, 26(5), 1992, pp. 387-390