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Landsberger, LM
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Kahrizi, M
Landheer, D
Bardwell, JA
Riopel, Y
Jean, C
Logiudice, V
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Citation: Ic. Ressejac et al., Bistable microelectrothermal actuator in a standard complementary metal-oxide-semiconductor process, J VAC SCI A, 18(2), 2000, pp. 746-749