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Results: 1-3 |
Results: 3
Test and testability of a monolithic MEMS for magnetic field sensing
Authors: Beroulle, V Bertrand, Y Latorre, L Nouet, P
Citation: V. Beroulle et al., Test and testability of a monolithic MEMS for magnetic field sensing, J ELEC TEST, 17(5), 2001, pp. 439-450
Characterization and modeling of a CMOS-compatible MEMS technology
Authors: Latorre, L Nouet, P Bertrand, Y Hazard, P Pressecq, F
Citation: L. Latorre et al., Characterization and modeling of a CMOS-compatible MEMS technology, SENS ACTU-A, 74(1-3), 1999, pp. 143-147
A complete methodology for electro-mechanical characterization of a CMOS compatible MEMS technology
Authors: Latorre, L Nouet, P
Citation: L. Latorre et P. Nouet, A complete methodology for electro-mechanical characterization of a CMOS compatible MEMS technology, IEICE TR EL, E82C(4), 1999, pp. 582-588
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