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Results:
1-4
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Results: 4
Fabrication of SiCN ceramic MEMS using injectable polymer-precursor technique
Authors:
Liew, LA Zhang, WG Bright, VM An, LN Dunn, ML Raj, R
Citation:
La. Liew et al., Fabrication of SiCN ceramic MEMS using injectable polymer-precursor technique, SENS ACTU-A, 89(1-2), 2001, pp. 64-70
Phase-only micromirror array fabricated by standard CMOS process
Authors:
Tuantranont, A Liew, LA Bright, VM Zhang, WG Lee, YC
Citation:
A. Tuantranont et al., Phase-only micromirror array fabricated by standard CMOS process, SENS ACTU-A, 89(1-2), 2001, pp. 124-134
Ceramic MEMS - New materials, innovative processing and future applications
Authors:
Liew, LA Zhang, WG An, LN Shah, S Luo, RL Liu, YP Cross, T Dunn, ML Bright, V Daily, JW Raj, R Anseth, K
Citation:
La. Liew et al., Ceramic MEMS - New materials, innovative processing and future applications, AM CERAM S, 80(5), 2001, pp. 25-30
Modeling of thermal actuation in a bulk-micromachined CMOS micromirror
Authors:
Liew, LA Tuantranont, A Bright, VM
Citation:
La. Liew et al., Modeling of thermal actuation in a bulk-micromachined CMOS micromirror, MICROELEC J, 31(9-10), 2000, pp. 791-801
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