Authors: Vorob'ev, AN Karpov, SY Bord, OV Zhmakin, AI Lovtsus, AA Makarov, YN

Citation: An. Vorob'Ev et al., Modeling of gas phase nucleation during silicon carbide chemical vapor deposition, DIAM RELAT, 9(3-6), 2000, pp. 472-475

Authors: Vorob'ev, AN Karpov, SY Zhmakin, AI Lovtsus, AA Makarov, YN Krishnan, A

Citation: An. Vorob'Ev et al., Effect of gas-phase nucleation on chemical vapor deposition of silicon carbide, J CRYST GR, 211(1-4), 2000, pp. 343-346