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Authors: BARBARELLA G OSTOJA P MACCAGNANI P PUDOVA O ANTOLINI L CASARINI D BONGINI A

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Authors: SOLMI S MACCAGNANI P CANTERI R

Citation: S. Solmi et al., CODIFFUSION OF ARSENIC AND PHOSPHORUS IMPLANTED IN SILICON, Journal of applied physics, 74(8), 1993, pp. 5005-5012