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Results: 1-10 |
Results: 10
DEPENDENCE OF THE QUALITY OF THICK RESIST STRUCTURES ON RESIST BAKING
Authors: BLEIDIESSEL G GRUETZNER G REUTHER F FEHLBERG S LOECHEL B MACIOSSEK A
Citation: G. Bleidiessel et al., DEPENDENCE OF THE QUALITY OF THICK RESIST STRUCTURES ON RESIST BAKING, Microelectronic engineering, 42, 1998, pp. 433-436
MICROCOILS FABRICATED BY UV DEPTH LITHOGRAPHY AND GALVANOPLATING
Authors: LOCHEL B MACIOSSEK A ROTHE M WINDBRACKE W
Citation: B. Lochel et al., MICROCOILS FABRICATED BY UV DEPTH LITHOGRAPHY AND GALVANOPLATING, Sensors and actuators. A, Physical, 54(1-3), 1996, pp. 663-668
ADVANCED RESIST PROCESSING FOR THICK PHOTORESIST APPLICATIONS
Authors: CULLMANN E LOECHEL B MACIOSSEK A ROTHE M
Citation: E. Cullmann et al., ADVANCED RESIST PROCESSING FOR THICK PHOTORESIST APPLICATIONS, Microelectronic engineering, 30(1-4), 1996, pp. 551-554
ELECTRODEPOSITED MAGNETIC-ALLOYS FOR SURFACE MICROMACHINING
Authors: LOCHEL B MACIOSSEK A
Citation: B. Lochel et A. Maciossek, ELECTRODEPOSITED MAGNETIC-ALLOYS FOR SURFACE MICROMACHINING, Journal of the Electrochemical Society, 143(10), 1996, pp. 3343-3348
ULTRAVIOLET DEPTH LITHOGRAPHY AND GALVANOFORMING FOR MICROMACHINING
Authors: LOCHEL B MACIOSSEK A QUENZER HJ WAGNER B
Citation: B. Lochel et al., ULTRAVIOLET DEPTH LITHOGRAPHY AND GALVANOFORMING FOR MICROMACHINING, Journal of the Electrochemical Society, 143(1), 1996, pp. 237-244
APPLICATION OF ULTRAVIOLET DEPTH LITHOGRAPHY FOR SURFACE MICROMACHINING
Authors: LOECHEL B MACIOSSEK A ROTHE M
Citation: B. Loechel et al., APPLICATION OF ULTRAVIOLET DEPTH LITHOGRAPHY FOR SURFACE MICROMACHINING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 2934-2939
MAGNETICALLY DRIVEN MICROSTRUCTURES FABRICATED WITH MULTILAYER ELECTROPLATING
Authors: LOCHEL B MACIOSSEK A QUENZER HJ WAGNER B ENGELMANN G
Citation: B. Lochel et al., MAGNETICALLY DRIVEN MICROSTRUCTURES FABRICATED WITH MULTILAYER ELECTROPLATING, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 98-103
GALVANOPLATING AND SACRIFICIAL LAYERS FOR SURFACE MICROMACHINING
Authors: MACIOSSEK A LOCHEL B QUENZER HJ WAGNER B SCHULZE S NOETZEL J
Citation: A. Maciossek et al., GALVANOPLATING AND SACRIFICIAL LAYERS FOR SURFACE MICROMACHINING, Microelectronic engineering, 27(1-4), 1995, pp. 503-508
GALVANOPLATED 3D STRUCTURES FOR MICRO SYSTEMS
Authors: LOCHEL B MACIOSSEK A KONIG M QUENZER HJ HUBER HL
Citation: B. Lochel et al., GALVANOPLATED 3D STRUCTURES FOR MICRO SYSTEMS, Microelectronic engineering, 23(1-4), 1994, pp. 455-459
FABRICATION OF MAGNETIC MICROSTRUCTURES BY USING THICK LAYER RESISTS
Authors: LOCHEL B MACIOSSEK A KONIG M HUBER HL BAUER G
Citation: B. Lochel et al., FABRICATION OF MAGNETIC MICROSTRUCTURES BY USING THICK LAYER RESISTS, Microelectronic engineering, 21(1-4), 1993, pp. 463-466
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