Authors:
FELCH SB
CHAPEK DL
MALIK SM
MAILLOT P
ISHIDA E
MAGEE CW
Citation: Sb. Felch et al., COMPARISON OF DIFFERENT ANALYTICAL TECHNIQUES IN MEASURING THE SURFACE REGION OF ULTRASHALLOW DOPING PROFILES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(1), 1996, pp. 336-340
Authors:
MENDICINO MA
VASUDEV PK
MAILLOT P
HOENER C
BAYLIS J
BENNETT J
BODEN T
JACKETT S
HUFFMAN K
GODWIN M
Citation: Ma. Mendicino et al., SILICON-ON-INSULATOR MATERIAL QUALIFICATION FOR LOW-POWER COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR APPLICATION, Thin solid films, 270(1-2), 1995, pp. 578-583
Authors:
CALAWAY WF
COON SR
PELLIN MJ
GRUEN DM
GORDON M
DIEBOLD AC
MAILLOT P
BANKS JC
KNAPP JA
Citation: Wf. Calaway et al., CHARACTERIZATION OF NI ON SI WAFERS - COMPARISON OF SURFACE-ANALYSIS TECHNIQUES, Surface and interface analysis, 21(2), 1994, pp. 131-137