Authors:
MALEVILLE C
ASPAR B
POUMEYROL T
MORICEAU H
BRUEL M
AUBERTONHERVE AJ
BARGE T
Citation: C. Maleville et al., WAFER BONDING AND H-IMPLANTATION MECHANISMS INVOLVED IN THE SMART-CUT(R) TECHNOLOGY, Materials science & engineering. B, Solid-state materials for advanced technology, 46(1-3), 1997, pp. 14-19
Authors:
AUBERTONHERVE AJ
BRUEL M
ASPAR B
MALEVILLE C
MORICEAU H
Citation: Aj. Aubertonherve et al., SMART-CUT(R) - THE BASIC FABRICATION UNIBOND(R) SOI WAFERS, IEICE transactions on electronics, E80C(3), 1997, pp. 358-363