Authors: MARKEVICH MI PISKUNOV FA CHAPLANOV AM MATUSEVICH LV CHAO C

Citation: Mi. Markevich et al., REDISTRIBUTION OF IMPLANTED IMPURITY DURI NG IMPULSE LASER EXCITATION, Doklady Akademii nauk BSSR, 41(1), 1997, pp. 50-54

Authors: MALYSHEV SA MARKEVICH MI MATUSEVICH LV PISKUNOV FA CHEN C

Citation: Sa. Malyshev et al., REDISTRIBUTION OF ION-IMPLANTED PHOSPHORUS IN SILICON DURING NANOSECOND LASER ANNEALING, Inorganic materials, 31(9), 1995, pp. 1056-1058