Authors: DUNCAN WM HENCK SA KUEHNE JW LOEWENSTEIN LM MAUNG S

Citation: Wm. Duncan et al., HIGH-SPEED SPECTRAL ELLIPSOMETRY FOR IN-SITU DIAGNOSTICS AND PROCESS-CONTROL, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(4), 1994, pp. 2779-2784

Authors: BARNA GG LOEWENSTEIN LM BRANKNER KJ BUTLER SW MOZUMDER PK STEFANI JA HENCK SA CHAPADOS P BUCK D MAUNG S SAXENA S UNRUH A

Citation: Gg. Barna et al., SENSOR INTEGRATION INTO PLASMA ETCH REACTORS OF A DEVELOPMENTAL PILOTLINE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(4), 1994, pp. 2860-2867

Authors: MAUNG S BANERJEE S DRAHEIM D HENCK S BUTLER SW

Citation: S. Maung et al., INTEGRATION OF IN-SITU SPECTRAL ELLIPSOMETRY WITH MMST MACHINE CONTROL, IEEE transactions on semiconductor manufacturing, 7(2), 1994, pp. 184-192

Authors: BUTLER SW STEFANI J SULLIVAN M MAUNG S BARNA G HENCK S

Citation: Sw. Butler et al., INTELLIGENT MODEL-BASED CONTROL-SYSTEM EMPLOYING IN-SITU ELLIPSOMETRY, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(4), 1994, pp. 1984-1991