Authors: PEDERSEN M MEIJERINK MGH OLTHUIS W BERGVELD P

Citation: M. Pedersen et al., A CAPACITIVE DIFFERENTIAL PRESSURE SENSOR WITH POLYIMIDE DIAPHRAGM, Journal of micromechanics and microengineering, 7(3), 1997, pp. 250-252

Authors: PEDERSEN M MEIJERINK MGH OLTHUIS W BERGVELD P

Citation: M. Pedersen et al., AN IC-COMPATIBLE POLYIMIDE PRESSURE SENSOR WITH CAPACITIVE READOUT, Sensors and actuators. A, Physical, 63(3), 1997, pp. 163-168