Authors: GOBBERT MK MERCHANT TP BORUCKI LJ CALE TS

Citation: Mk. Gobbert et al., A MULTISCALE SIMULATOR FOR LOW-PRESSURE CHEMICAL-VAPOR-DEPOSITION, Journal of the Electrochemical Society, 144(11), 1997, pp. 3945-3951

Authors: MERCHANT TP COLE JV KNUTSON KL HEBB JP JENSEN KF

Citation: Tp. Merchant et al., A SYSTEMATIC-APPROACH TO SIMULATING RAPID THERMAL-PROCESSING SYSTEMS, Journal of the Electrochemical Society, 143(6), 1996, pp. 2035-2043