Authors: BLAKE J JONES M MEYYAPPAN N HIROKAWA S SATO M

Citation: J. Blake et al., GENERATION AND TRANSPORT OF CONTAMINATION IN HIGH-CURRENT IMPLANTERS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 96(1-2), 1995, pp. 56-61

Authors: ZHANG L SHOHET JL DALLMANN D BOOSKE JH SPETH RR SHENAI K GOECKNER MJ KRUGER JB RISSMAN P TURNER JE PEREZALBUERNE E LEE S MEYYAPPAN N

Citation: L. Zhang et al., LOW-ENERGY SEPARATION BY IMPLANTATION OF OXYGEN STRUCTURES VIA PLASMASOURCE ION-IMPLANTATION, Applied physics letters, 65(8), 1994, pp. 962-964