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JONES M
MEYYAPPAN N
HIROKAWA S
SATO M
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ZHANG L
SHOHET JL
DALLMANN D
BOOSKE JH
SPETH RR
SHENAI K
GOECKNER MJ
KRUGER JB
RISSMAN P
TURNER JE
PEREZALBUERNE E
LEE S
MEYYAPPAN N
Citation: L. Zhang et al., LOW-ENERGY SEPARATION BY IMPLANTATION OF OXYGEN STRUCTURES VIA PLASMASOURCE ION-IMPLANTATION, Applied physics letters, 65(8), 1994, pp. 962-964