Authors:
CABRAL C
CLEVENGER LA
HARPER JME
DHEURLE FM
ROY RA
SAENGER KL
MILES GL
MANN RW
Citation: C. Cabral et al., LOWERING THE FORMATION TEMPERATURE OF THE C54-TISI2 PHASE USING A METALLIC INTERFACIAL LAYER, Journal of materials research, 12(2), 1997, pp. 304-307
Citation: Ma. Lavoie et al., TOTAL-REFLECTION X-RAY-FLUORESCENCE ANALYSIS OF PLANARIZED SEMICONDUCTOR PRODUCT WAFERS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(3), 1996, pp. 1924-1926
Authors:
ADLER E
DEBROSSE JK
GEISSLER SF
HOLMES SJ
JAFFE MD
JOHNSON JB
KOBURGER CW
LASKY JB
LLOYD B
MILES GL
NAKOS JS
NOBLE WP
VOLDMAN SH
ARMACOST M
FERGUSON R
Citation: E. Adler et al., THE EVOLUTION OF IBM CMOS DRAM TECHNOLOGY, IBM journal of research and development, 39(1-2), 1995, pp. 167-188
Authors:
KOBURGER CW
CLARK WF
ADKISSON JW
ADLER E
BAKEMAN PE
BERGENDAHL AS
BOTULA AB
CHANG W
DAVARI B
GIVENS JH
HANSEN HH
HOLMES SJ
HORAK DV
LAM CH
LASKY JB
LUCE SE
MANN RW
MILES GL
NAKOS JS
NOWAK EJ
SHAHIDI G
TAUR Y
WHITE FR
WORDEMAN MR
Citation: Cw. Koburger et al., A HALF-MICRON CMOS LOGIC GENERATION, IBM journal of research and development, 39(1-2), 1995, pp. 215-227
Authors:
MANN RW
MILES GL
KNOTTS TA
RAKOWSKI DW
CLEVENGER LA
HARPER JME
DHEURLE FM
CABRAL C
Citation: Rw. Mann et al., REDUCTION OF THE C54-TISI2 PHASE-TRANSFORMATION TEMPERATURE USING REFRACTORY-METAL ION-IMPLANTATION, Applied physics letters, 67(25), 1995, pp. 3729-3731