Authors: GREENFIELD DE KORSAKOV VS MISHACHOV VI TRUTNEV NF

Citation: De. Greenfield et al., CONTROL OF PRODUCING SUMICRON X-RAY MASKS, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 405(2-3), 1998, pp. 514-518

Authors: KORSAKOV VS MAZURENKO SN MISHACHOV VI TRUTNEV NF

Citation: Vs. Korsakov et al., HIGH-PRECISION FORMING OF MASKING COATINGS OF X-RAY MASKS DIRECTLY ONTHE MEMBRANES, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 359(1-2), 1995, pp. 398-399