Authors:
KOMAROV FF
MOZOLEVSKI IE
MATSU PP
ANANICH SE
Citation: Ff. Komarov et al., DISTRIBUTION OF IMPLANTED IMPURITIES AND DEPOSITED ENERGY IN HIGH-ENERGY ION-IMPLANTATION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 124(4), 1997, pp. 478-483
Citation: Ff. Komarov et al., 2-DIMENSIONAL BOLTZMANN TRANSPORT-EQUATION APPROACH TO SIMULATION OF LOCAL ION-IMPLANTATION, Radiation effects and defects in solids, 133(2), 1995, pp. 133-139