Authors: Butoi, CI Mackie, NM Gamble, LJ Castner, DG Barnd, J Miller, AM Fisher, ER

Citation: Ci. Butoi et al., Deposition of highly ordered CF2-rich films using continuous wave and pulsed hexafluoropropylene oxide plasmas, CHEM MATER, 12(7), 2000, pp. 2014-2024

Authors: Butoi, CI Mackie, NM Williams, KL Capps, NE Fisher, ER

Citation: Ci. Butoi et al., Ion and substrate effects on surface reactions of CF2 using C2F6, C2F6/H-2, and hexafluoropropylene oxide plasmas, J VAC SCI A, 18(6), 2000, pp. 2685-2698

Authors: Butoi, CI Mackie, NM Barnd, JL Fisher, ER Gamble, LJ Castner, DG

Citation: Ci. Butoi et al., Control of surface film composition and orientation with downstream PECVD of hexafluoropropylene oxide, CHEM MATER, 11(4), 1999, pp. 862

Authors: Capps, NE Mackie, NM Fisher, ER

Citation: Ne. Capps et al., Surface interactions of CF2 radicals during deposition of amorphous fluorocarbon films from CHF3 plasmas, J APPL PHYS, 84(9), 1998, pp. 4736-4743