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Authors: Chiniwalla, P Manepalli, R Farnsworth, K Boatman, M Dusch, B Kohl, P Bidstrup-Allen, SA

Citation: P. Chiniwalla et al., Multilayer planarization of polymer dielectrics, IEEE T AD P, 24(1), 2001, pp. 41-53

Authors: Manepalli, R Farnsworth, KD Allen, SAB Kohl, PA

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Authors: Manepalli, R Stepaniak, F Bidstrup-Allen, SA Kohl, PA

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