Authors:
Di Fabrizio, E
Gentili, M
Mastrogiacomo, L
Citation: E. Di Fabrizio et al., Fabrication of self-standing, size-adjustable nickel structures with nanometer resolution., MICROEL ENG, 46(1-4), 1999, pp. 161-164
Authors:
Gerardino, A
Gentili, M
Di Fabrizio, E
Calarco, R
Mastrogiacomo, L
Citation: A. Gerardino et al., Study of nanometer resolution resist slope for the UVIII chemically amplified resist., MICROEL ENG, 46(1-4), 1999, pp. 201-204