Authors: Cale, TS Merchant, TP Borucki, LJ Labun, AH

Citation: Ts. Cale et al., Topography simulation for the virtual wafer fab, THIN SOL FI, 365(2), 2000, pp. 152-175

Authors: Merchant, TP Gobbert, MK Cale, TS Borucki, LJ

Citation: Tp. Merchant et al., Multiple scale integrated modeling of deposition processes, THIN SOL FI, 365(2), 2000, pp. 368-375

Authors: Cale, TS Rogers, BR Merchant, TP Borucki, LJ

Citation: Ts. Cale et al., Deposition and etch processes: continuum film evolution in microelectronics, COMP MAT SC, 12(4), 1998, pp. 333-353