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Results: 1-25/37
Authors:
Seifert, A
Ledermann, N
Hiboux, S
Baborowski, J
Muralt, P
Setter, N
Citation: A. Seifert et al., Processing optimization of solution derived PbZr1-xTixO3 thin films for piezoelectric applications, INTEGR FERR, 35(1-4), 2001, pp. 1889-1896
Authors:
Ledermann, N
Baborowski, J
Seifert, A
Willing, B
Hiboux, S
Muralt, P
Setter, N
Forster, M
Citation: N. Ledermann et al., Piezoelectric cantilever microphone for photoacoustic GAS detector, INTEGR FERR, 35(1-4), 2001, pp. 1907-1914
Authors:
Haccart, T
Cattan, E
Remiens, D
Hiboux, S
Muralt, P
Citation: T. Haccart et al., Ferroelectric and piezoelectric properties of Nb doped PZT films, INTEGR FERR, 35(1-4), 2001, pp. 1969-1978
Authors:
Engelmark, F
Iriarte, GF
Katardjiev, IV
Ottosson, M
Muralt, P
Berg, S
Citation: F. Engelmark et al., Structural and electroacoustic studies of AIN thin films during low temperature radio frequency sputter deposition, J VAC SCI A, 19(5), 2001, pp. 2664-2669
Authors:
Muralt, P
Citation: P. Muralt, Micromachined infrared detectors based on pyroelectric thin films, REP PR PHYS, 64(10), 2001, pp. 1339-1388
Authors:
Dubois, MA
Muralt, P
Citation: Ma. Dubois et P. Muralt, Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering, J APPL PHYS, 89(11), 2001, pp. 6389-6395
Authors:
Costantini, DM
Limberger, HG
Salathe, RP
Muller, CAP
Muralt, P
Setter, N
Citation: Dm. Costantini et al., All-fiber phase modulator based on lead zirconate titanate thin-film coating, APPL PHYS L, 78(15), 2001, pp. 2193-2195
Authors:
Baborowski, J
Muralt, P
Ledermann, N
Colla, E
Seifert, A
Gentil, S
Setter, N
Citation: J. Baborowski et al., Mechanisms of Pb(Zr0.53Ti0.47)O-3 thin film etching with ECR/RF reactor, INTEGR FERR, 31(1-4), 2000, pp. 261-271
Authors:
Malic, B
Kosec, M
Arcon, I
Kodre, A
Hiboux, S
Muralt, P
Citation: B. Malic et al., PZT thin films prepared from modified zirconium alkoxide, INTEGR FERR, 30(1-4), 2000, pp. 81-89
Authors:
Muralt, P
Citation: P. Muralt, Ferroelectric thin films for micro-sensors and actuators: a review, J MICROM M, 10(2), 2000, pp. 136-146
Authors:
Muralt, P
Citation: P. Muralt, PZT thin films for microsensors and actuators: Where do we stand?, IEEE ULTRAS, 47(4), 2000, pp. 903-915
Authors:
Ledermann, N
Baborowski, J
Muralt, P
Xantopoulos, N
Tellenbach, JM
Citation: N. Ledermann et al., Sputtered silicon carbide thin films as protective coating for MEMS applications, SURF COAT, 125(1-3), 2000, pp. 246-250
Authors:
Baborowski, J
Muralt, P
Ledermann, N
Hiboux, S
Citation: J. Baborowski et al., Etching of RuO2 and Pt thin films with ECR/RF reactor, VACUUM, 56(1), 2000, pp. 51-56
Authors:
Stolichnov, I
Tagantsev, A
Colla, E
Gentil, S
Hiboux, S
Baborowski, J
Muralt, P
Setter, N
Citation: I. Stolichnov et al., Downscaling of Pb(Zr,Ti)O-3 film thickness for low-voltage ferroelectric capacitors: Effect of charge relaxation at the interfaces, J APPL PHYS, 88(4), 2000, pp. 2154-2156
Authors:
Haccart, T
Cattan, E
Remiens, D
Hiboux, S
Muralt, P
Citation: T. Haccart et al., Evaluation of niobium effects on the longitudinal piezoelectric coefficients of Pb(Zr, Ti)O-3 thin films, APPL PHYS L, 76(22), 2000, pp. 3292-3294
Authors:
Baborowski, J
Muralt, P
Ledermann, N
Citation: J. Baborowski et al., Etching of platinum thin films with dual frequency ECR/RF reactor, INTEGR FERR, 27(1-4), 1999, pp. 1287-1300
Authors:
Ledermann, N
Seifert, A
Hiboux, S
Muralt, P
Citation: N. Ledermann et al., Effective transverse piezoelectric coefficient e(31,f) of (100)/(001) textured PZT thin films, INTEGR FERR, 24(1-4), 1999, pp. 13-18
Authors:
Sagalowicz, L
Fox, GR
Dubois, MA
Muller, CAP
Muralt, P
Setter, N
Citation: L. Sagalowicz et al., Microstructure and defects of wurtzite structure thin films, J EUR CERAM, 19(6-7), 1999, pp. 1427-1430
Authors:
Dubois, MA
Muralt, P
Citation: Ma. Dubois et P. Muralt, Measurement of the effective transverse piezoelectric coefficient e(31,f) of AlN and Pb(Zr-x,Ti1-x)O-3 thin films, SENS ACTU-A, 77(2), 1999, pp. 106-112
Authors:
Seifert, A
Sagalowicz, L
Muralt, P
Setter, N
Citation: A. Seifert et al., Microstructural evolution of dense and porous pyroelectric Pb1-xCaxTiO3 thin films, J MATER RES, 14(5), 1999, pp. 2012-2022
Authors:
Hiboux, S
Muralt, P
Maeder, T
Citation: S. Hiboux et al., Domain and lattice contributions to dielectric and piezoelectric properties of Pb(Zr-x,Ti1-x)O-3 thin films as a function of composition, J MATER RES, 14(11), 1999, pp. 4307-4318
Authors:
Maeder, T
Muralt, P
Sagalowicz, L
Citation: T. Maeder et al., Growth of (111)-oriented PZT on RuO2(100)/Pt(111) electrodes by in-situ sputtering, THIN SOL FI, 345(2), 1999, pp. 300-306
Authors:
Hong, S
Colla, EL
Kim, E
Taylor, DV
Tagantsev, AK
Muralt, P
No, K
Setter, N
Citation: S. Hong et al., High resolution study of domain nucleation and growth during polarization switching in Pb(Zr,Ti)O-3 ferroelectric thin film capacitors, J APPL PHYS, 86(1), 1999, pp. 607-613
Authors:
Willing, B
Muralt, P
Setter, N
Oehlero, O
Citation: B. Willing et al., Gas spectrometry based on a pyroelectric thin film array, FERROELECTR, 225(1-4), 1999, pp. 807
Authors:
Seifert, A
Muralt, P
Setter, N
Citation: A. Seifert et al., Electrical properties and microstructural evolution of porous Pb1-xCaxTiO3pyroelectric thin films, FERROELECTR, 225(1-4), 1999, pp. 855-862