Citation: E. Hesse et al., A LITHIUM LIQUID-METAL ION-SOURCE WITH A NARROW-ANGLE EMISSION FOR WRITING BEAM LITHOGRAPHY, Microelectronic engineering, 23(1-4), 1994, pp. 111-114
Citation: E. Hesse et Fk. Naehring, NARROW ANGLE EMISSION FROM A LITHIUM LIQUID-METAL ION-SOURCE, Journal of physics. D, Applied physics, 26(4), 1993, pp. 717-718