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Results: 1-11 |
Results: 11
COMPOSITION CENTRAL BY CURRENT MODULATION IN DC-REACTIVE SPUTTERING
Authors: NYBERG T NENDER C BERG S
Citation: T. Nyberg et al., COMPOSITION CENTRAL BY CURRENT MODULATION IN DC-REACTIVE SPUTTERING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(3), 1998, pp. 1868-1872
COMPUTER MODELING AS A TOOL TO PREDICT DEPOSITION RATE AND FILM COMPOSITION IN THE REACTIVE SPUTTERING PROCESS
Authors: BERG S NYBERG T BLOM HO NENDER C
Citation: S. Berg et al., COMPUTER MODELING AS A TOOL TO PREDICT DEPOSITION RATE AND FILM COMPOSITION IN THE REACTIVE SPUTTERING PROCESS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(3), 1998, pp. 1277-1285
MODELING OF THE DEPOSITION OF STOICHIOMETRIC AL2O3 USING NONARCING DIRECT-CURRENT MAGNETRON SPUTTERING
Authors: MACAK K NYBERG T MACAK P OLSSON MK HELMERSSON U BERG S
Citation: K. Macak et al., MODELING OF THE DEPOSITION OF STOICHIOMETRIC AL2O3 USING NONARCING DIRECT-CURRENT MAGNETRON SPUTTERING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(3), 1998, pp. 1286-1292
DIAMOND DEPOSITION IN A MICROWAVE ELECTRODE DISCHARGE AT REDUCED PRESSURES
Authors: BARDOS L BARANKOVA H LEBEDEV YA NYBERG T BERG S
Citation: L. Bardos et al., DIAMOND DEPOSITION IN A MICROWAVE ELECTRODE DISCHARGE AT REDUCED PRESSURES, DIAMOND AND RELATED MATERIALS, 6(2-4), 1997, pp. 224-229
DIAMOND DEPOSITION FROM HALOGENATED METHANE PRECURSORS ON SI AND SIC SUBSTRATES
Authors: NYBERG T HESZLER P CARLSSON JO
Citation: T. Nyberg et al., DIAMOND DEPOSITION FROM HALOGENATED METHANE PRECURSORS ON SI AND SIC SUBSTRATES, DIAMOND AND RELATED MATERIALS, 6(1), 1997, pp. 85-88
STUDIES OF REACTIVE SPUTTERING OF MULTIPHASE CHROMIUM NITRIDE
Authors: NYBERG T SKYTT P GALNANDER B NENDER C NORDGREN J BERG S
Citation: T. Nyberg et al., STUDIES OF REACTIVE SPUTTERING OF MULTIPHASE CHROMIUM NITRIDE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(2), 1997, pp. 248-252
IN-SITU DIAGNOSTIC STUDIES OF REACTIVE COSPUTTERING FROM 2 TARGETS BYMEANS OF SOFT-X-RAY AND OPTICAL-EMISSION SPECTROSCOPY
Authors: NYBERG T SKYTT P GALNANDER B NENDER C NORDGREN J BERG S
Citation: T. Nyberg et al., IN-SITU DIAGNOSTIC STUDIES OF REACTIVE COSPUTTERING FROM 2 TARGETS BYMEANS OF SOFT-X-RAY AND OPTICAL-EMISSION SPECTROSCOPY, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(1), 1997, pp. 145-148
THE INFLUENCE OF THE DEPOSITION ANGLE ON THE COMPOSITION OF REACTIVELY SPUTTERED THIN-FILMS
Authors: NYBERG T NENDER C HOGBERG H BERG S
Citation: T. Nyberg et al., THE INFLUENCE OF THE DEPOSITION ANGLE ON THE COMPOSITION OF REACTIVELY SPUTTERED THIN-FILMS, Surface & coatings technology, 94-5(1-3), 1997, pp. 242-246
PROBE DEPTH VARIATION IN GRAZING EXIT SOFT-X-RAY EMISSION-SPECTROSCOPY
Authors: SKYTT P GALANDER B NYBERG T NORDGREN J ISBERG P
Citation: P. Skytt et al., PROBE DEPTH VARIATION IN GRAZING EXIT SOFT-X-RAY EMISSION-SPECTROSCOPY, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 384(2-3), 1997, pp. 558-562
EFFECT OF THE SPACE-CHARGE SHEATH ON PROPERTIES OF CARBON AND DIAMONDFILMS IN THE RF PLASMA-JET
Authors: BARDOS L NYBERG T BARANKOVA H BERG S
Citation: L. Bardos et al., EFFECT OF THE SPACE-CHARGE SHEATH ON PROPERTIES OF CARBON AND DIAMONDFILMS IN THE RF PLASMA-JET, DIAMOND AND RELATED MATERIALS, 3(4-6), 1994, pp. 528-530
DEPOSITION OF CARBONACEOUS FILMS ONTO INTERNAL WALLS OF TUBES
Authors: BARDOS L BARANKOVA H NYBERG T BERG S
Citation: L. Bardos et al., DEPOSITION OF CARBONACEOUS FILMS ONTO INTERNAL WALLS OF TUBES, Journal of the Electrochemical Society, 141(2), 1994, pp. 374-377
Risultati: 1-11 |