Authors:
Neyret, E
Di Cioccio, L
Bluet, JM
Pernot, J
Vicente, P
Anglos, D
Lagadas, M
Billon, T
Citation: E. Neyret et al., Deposition, evaluation and control of 4H and 6H SiC epitaxial layers for device applications, MAT SCI E B, 80(1-3), 2001, pp. 332-336
Authors:
Neyret, E
Ferro, G
Juillaguet, S
Bluet, JM
Jaussaud, C
Camassel, J
Citation: E. Neyret et al., Optical investigation of residual doping species in 6H and 4H-SIC layers grown by chemical vapor deposition, MAT SCI E B, 61-2, 1999, pp. 253-257