Authors: Suchaneck, G Norkus, V Gerlach, G

Citation: G. Suchaneck et al., Low-temperature PECVD-deposited silicon nitride thin films for sensor applications, SURF COAT, 142, 2001, pp. 808-812

Authors: Sokoll, T Norkus, V Gerlach, G

Citation: T. Sokoll et al., Infrared linear arrays with 256 pixels based on lithium tantalate, TEC MES, 66(3), 1999, pp. 97-103