Citation: I. Ogo et Nc. Macdonald, APPLICATION OF TIME-RESOLVED SCANNING ELECTRON-MICROSCOPY TO THE ANALYSIS OF THE MOTION OF MICROMECHANICAL STRUCTURES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(3), 1996, pp. 1630-1634
Authors:
MACDONALD NC
ADAMS SG
AYON AA
BOHRINGER KF
CHEN LY
DAS JH
HARONIAN D
HOFMANN W
HUANG XT
JAZAIRY A
MIHAILOVICH RE
MILLER SA
OGO I
PRASAD R
REED BW
SAIF MTA
SHAW KA
WEBB RY
XU Y
Citation: Nc. Macdonald et al., MICROMACHINED MICRODEVICES AND MICROINSTRUMENTS, Microelectronic engineering, 30(1-4), 1996, pp. 563-564
Citation: I. Ogo et Nc. Macdonald, MICROMECHANICAL STRUCTURES FOR ELECTRON-BEAM AND ION-BEAM IRRADIATIONPHENOMENA, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3285-3288