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Results: 3
USE OF CL-2-DISCHARGE CONDITIONS(AR MIXTURES IN ETCHING SILICON ON THE CATHODE UNDER DC GLOW)
Authors: OVCHINNIKOV NL SVETTSOV VI EFREMOV AM
Citation: Nl. Ovchinnikov et al., USE OF CL-2-DISCHARGE CONDITIONS(AR MIXTURES IN ETCHING SILICON ON THE CATHODE UNDER DC GLOW), Inorganic materials, 34(5), 1998, pp. 417-418
SILICON ETCHING ON THE CATHODE IN A CHLORINE GLOW-DISCHARGE
Authors: OVCHINNIKOV NL SVETTSOV VI EFREMOV AM
Citation: Nl. Ovchinnikov et al., SILICON ETCHING ON THE CATHODE IN A CHLORINE GLOW-DISCHARGE, High energy chemistry, 31(6), 1997, pp. 404-406
TOTAL POTENTIALITIES OF CHLORINE INTERACT ION WITH COPPER IN NONEQUILIBRIUM PLASMA
Authors: EFREMOV AM SVETSOV VI OVCHINNIKOV NL
Citation: Am. Efremov et al., TOTAL POTENTIALITIES OF CHLORINE INTERACT ION WITH COPPER IN NONEQUILIBRIUM PLASMA, Izvestia vyssih ucebnyh zavedenij. Himia i himiceskaa tehnologia, 38(1-2), 1995, pp. 38-41
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