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Authors:
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Swann, CP
Jawad, ZS
Alford, T
Citation: Jo. Olowolafe et al., Effect of composition on thermal stability and electrical resistivity of Ta-Si-N films, THIN SOL FI, 365(1), 2000, pp. 19-21
Authors:
Kolodzey, J
Chowdhury, EA
Adam, TN
Qui, GH
Rau, I
Olowolafe, JO
Suehle, JS
Chen, Y
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