Authors:
Iliadis, AA
Andronescu, SN
Edinger, K
Orloff, JH
Vispute, RD
Talyansky, V
Sharma, RP
Venkatesan, T
Wood, MC
Jones, KA
Citation: Aa. Iliadis et al., Ohmic contacts to p-6H-SiC using focused ion-beam surface-modification andpulsed laser epitaxial TiN deposition, APPL PHYS L, 73(24), 1998, pp. 3545-3547