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WUTTE D
FREEDMAN S
GOUGH R
LEE Y
LEITNER M
LEUNG KN
LYNEIS C
PICKARD DS
WILLIAMS MD
XIE ZQ
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Authors:
LEE Y
GOUGH RA
KUNKEL WB
LEUNG KN
PERKINS LT
PICKARD DS
SUN L
VUJIC J
WILLIAMS MD
WUTTE D
MONDELLI AA
STENGL G
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Authors:
LEE Y
GOUGH RA
KUNKEL WB
LEUNG KN
PERKINS LT
PICKARD DS
SUN L
VUJIC J
WILLIAMS MD
WUTTE D
Citation: Y. Lee et al., ION ENERGY SPREAD AND CURRENT MEASUREMENTS OF THE RF-DRIVEN MULTICUSPION-SOURCE, Review of scientific instruments, 68(3), 1997, pp. 1398-1402
Authors:
LEE Y
GOUGH RA
KUNKEL WB
LEUNG KN
PERKINS LT
PICKARD DS
SUN L
VUJIC J
WILLIAMS MD
Citation: Y. Lee et al., DEVELOPMENT OF ION SOURCES FOR ION PROJECTION LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3947-3950
Authors:
LEE Y
GOUGH RA
KUNKEL WB
LEUNG KN
PERKINS LT
PICKARD DS
SUN L
VUJIC J
WILLIAMS MD
WUTTE D
Citation: Y. Lee et al., A COMPACT FILAMENT-DRIVEN MULTICUSP ION-SOURCE, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 119(4), 1996, pp. 543-548
Authors:
PERKINS LT
DEVRIES GJ
HERZ PR
KUNKEL WB
LEUNG KN
PICKARD DS
WENGROW A
WILLIAMS MD
Citation: Lt. Perkins et al., PERFORMANCE CHARACTERIZATION OF RF-DRIVEN MULTICUSP ION SOURCES, Review of scientific instruments, 67(3), 1996, pp. 1057-1059
Authors:
PICKARD DS
LEUNG KN
PERKINS LT
PENCE DM
YOUNG AT
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