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Results:
1-12
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Results: 12
Authors:
LEHNERT W
BERGER R
SCHNEIDER C
PFITZNER L
RYSSEL H
STEHLE JL
PIEL JP
NEUMANN W
Citation: W. Lehnert et al., IN-SITU SPECTROSCOPIC ELLIPSOMETRY FOR ADVANCED PROCESS-CONTROL IN VERTICAL FURNACES, Thin solid films, 313, 1998, pp. 442-445
Authors:
PICKERING C
RUSSELL J
NAYAR V
IMSCHWEILER J
WILLE H
HARRINGTON S
WIGGINS C
STEHLE JL
PIEL JP
BRUCHEZ J
Citation: C. Pickering et al., EVALUATION OF AUTOMATED SPECTROSCOPIC ELLIPSOMETRY FOR IN-LINE PROCESS-CONTROL - ESPRIT SEMICONDUCTOR EQUIPMENT ASSESSMENT (SEA) PROJECT IMPROVE, Thin solid films, 313, 1998, pp. 446-453
Authors:
LUTTMANN M
STEHLE JL
DEFRANOUX C
PIEL JP
Citation: M. Luttmann et al., HIGH-ACCURACY IR ELLIPSOMETER WORKING WITH A GE BREWSTER-ANGLE REFLECTION POLARIZER AND GRID ANALYZER, Thin solid films, 313, 1998, pp. 631-641
Authors:
DEFRANOUX C
PIEL JP
STEHLE JL
Citation: C. Defranoux et al., DEEP ULTRA-VIOLET MEASUREMENTS OF SION ANTIREFLECTIVE COATINGS BY SPECTROSCOPIC ELLIPSOMETRY, Thin solid films, 313, 1998, pp. 742-744
Authors:
BOHER P
STEHLE JL
PIEL JP
FRIED M
LOHNER T
POLGAR O
KHANH NQ
BARSONY I
Citation: P. Boher et al., SPECTROSCOPIC ELLIPSOMETRY APPLIED TO THE DETERMINATION OF AN ION-IMPLANTATION DEPTH PROFILE, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 112(1-4), 1996, pp. 160-168
Authors:
FRIED M
LOHNER T
POLGAR O
PETRIK P
VAZSONYI E
BARSONY I
PIEL JP
STEHLE JL
Citation: M. Fried et al., CHARACTERIZATION OF DIFFERENT POROUS SILICON STRUCTURES BY SPECTROSCOPIC ELLIPSOMETRY, Thin solid films, 276(1-2), 1996, pp. 223-227
Authors:
BOHER P
PIEL JP
STEHLE JL
Citation: P. Boher et al., SPECTROSCOPIC ELLIPSOMETRY FOR SI1-XGEX CHARACTERIZATION - COMPARISONWITH OTHER EXPERIMENTAL-TECHNIQUES, Journal of crystal growth, 157(1-4), 1995, pp. 73-79
Authors:
ZALCZER G
THOMAS O
PIEL JP
STEHLE JL
Citation: G. Zalczer et al., IR SPECTROSCOPIC ELLIPSOMETRY - INSTRUMENTATION AND APPLICATIONS IN SEMICONDUCTORS, Thin solid films, 234(1-2), 1993, pp. 356-362
Authors:
PIEL JP
Citation: Jp. Piel, DETERMINATION OF THE SIGN OF DELTA IN SPECTROSCOPIC ELLIPSOMETRY WITHOUT A QUARTER-WAVE PLATE - CALCULATION AND APPLICATIONS, Thin solid films, 234(1-2), 1993, pp. 447-450
Authors:
PIEL JP
Citation: Jp. Piel, SPECTROSCOPIC ELLIPSOMETRY CHARACTERIZATION OF THE INDEX PROFILE IN INHOMOGENEOUS THIN-FILMS, Thin solid films, 234(1-2), 1993, pp. 451-453
Authors:
PICKERING C
CARLINE RT
GARAWAL NS
STEHLE JL
PIEL JP
BLUNT R
KIRBY P
Citation: C. Pickering et al., NONDESTRUCTIVE CHARACTERIZATION OF III-V ALLOY MULTILAYER STRUCTURES USING SPECTROSCOPIC ELLIPSOMETRY, Thin solid films, 233(1-2), 1993, pp. 171-175
Authors:
PIEL JP
STEHLE JL
THOMAS O
Citation: Jp. Piel et al., THE FASTEST REAL-TIME SPECTROSCOPIC ELLIPSOMETRY - APPLICATIONS AND LIMITATIONS FOR IN-SITU AND QUALITY-CONTROL, Thin solid films, 233(1-2), 1993, pp. 301-306
Risultati:
1-12
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