Authors:
Yang, S
Mirau, PA
Pai, CS
Nalamasu, O
Reichmanis, E
Lin, EK
Lee, HJ
Gidley, DW
Sun, JN
Citation: S. Yang et al., Molecular templating of nanoporous ultralow dielectric constant (approximate to 1.5) organosilicates by tailoring the microphase separation of triblock copolymers, CHEM MATER, 13(9), 2001, pp. 2762
Citation: Jp. Chang et al., Integration of fluorinated amorphous carbon as low-dielectric constant insulator: Effects of heating and deposition of tantalum nitride, J VAC SCI A, 17(5), 1999, pp. 2969-2974