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Results:
1-3
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Results: 3
New plating bath for electroless copper deposition on sputtered barrier layers
Authors:
Lantasov, Y Palmans, R Maex, K
Citation:
Y. Lantasov et al., New plating bath for electroless copper deposition on sputtered barrier layers, MICROEL ENG, 50(1-4), 2000, pp. 441-447
Self-annealing characterization of electroplated copper films
Authors:
Lagrange, S Brongersma, SH Judelewicz, M Saerens, A Vervoort, I Richard, E Palmans, R Maex, K
Citation:
S. Lagrange et al., Self-annealing characterization of electroplated copper films, MICROEL ENG, 50(1-4), 2000, pp. 449-457
Electroless deposition of Cu with solutions containing either Mg2+ or Pd2+ions
Authors:
Mouroux, A Zhang, SL Palmans, R Min, WS Maex, K
Citation:
A. Mouroux et al., Electroless deposition of Cu with solutions containing either Mg2+ or Pd2+ions, PHYS SCR, T79, 1999, pp. 232-235
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