Authors: Ruske, M Brauer, G Pistner, J Pfafflin, U Szczyrbowski, J

Citation: M. Ruske et al., Properties of SnO2 films prepared by DC and MF reactive sputtering, THIN SOL FI, 351(1-2), 1999, pp. 146-150

Authors: Ruske, M Brauer, G Pistner, J Szczyrbowski, J Weigert, M

Citation: M. Ruske et al., Properties of SiO2 and Si3N4 layers deposited by MF twin magnetron sputtering using different target materials, THIN SOL FI, 351(1-2), 1999, pp. 158-163