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Results: 2
Vapour supply manifold for additive nanolithography with electron beam induced deposition
Authors:
Koops, HWP Reinhardt, A Klabunde, F Kaya, A Plontke, R
Citation:
Hwp. Koops et al., Vapour supply manifold for additive nanolithography with electron beam induced deposition, MICROEL ENG, 57-8, 2001, pp. 909-913
On-line nanolithography using electron beam-induced deposition technique
Authors:
Hubner, U Plontke, R Blume, M Reinhardt, A Koops, HWP
Citation:
U. Hubner et al., On-line nanolithography using electron beam-induced deposition technique, MICROEL ENG, 57-8, 2001, pp. 953-958
Risultati:
1-2
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