Authors:
Copel, M
Cartier, E
Gusev, EP
Guha, S
Bojarczuk, N
Poppeller, M
Citation: M. Copel et al., Robustness of ultrathin aluminum oxide dielectrics on Si(001) (vol 78, pg 2670, 2001), APPL PHYS L, 78(26), 2001, pp. 4199-4199
Citation: M. Poppeller et al., Hot Electron Emission Lithography: a method for efficient large area e-beam projection, MICROEL ENG, 46(1-4), 1999, pp. 183-186