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Citation: E. Quevy et al., 3-D self-assembling and actuation of electrostatic microstructures, IEEE DEVICE, 48(8), 2001, pp. 1833-1839

Authors: Agache, V Quevy, E Collard, D Buchaillot, L

Citation: V. Agache et al., Stiction-controlled locking system for three-dimensional self-assembled microstructures: Theory and experimental validation, APPL PHYS L, 79(23), 2001, pp. 3869-3871