AAAAAA

   
Results: 1-12 |
Results: 12
2 STEPS MICROMOULDING AND PHOTOPOLYMER HIGH-ASPECT-RATIO STRUCTURING FOR APPLICATIONS IN PIEZOELECTRIC MOTOR COMPONENTS
Authors: DELLMANN L ROTH S BEURET C PARATTE L RACINE GA LORENZ H DESPONT M RENAUD P VETTIGER P DEROOIJ NF
Citation: L. Dellmann et al., 2 STEPS MICROMOULDING AND PHOTOPOLYMER HIGH-ASPECT-RATIO STRUCTURING FOR APPLICATIONS IN PIEZOELECTRIC MOTOR COMPONENTS, Microsystem technologies, 4(3), 1998, pp. 147-150
FABRICATION PROCESS OF HIGH-ASPECT-RATIO ELASTIC AND SU-8 STRUCTURES FOR PIEZOELECTRIC MOTOR APPLICATIONS
Authors: DELLMANN L ROTH S BEURET C RACINE GA LORENZ H DESPONT M RENAUD P VETTIGER P DEROOIJ NF
Citation: L. Dellmann et al., FABRICATION PROCESS OF HIGH-ASPECT-RATIO ELASTIC AND SU-8 STRUCTURES FOR PIEZOELECTRIC MOTOR APPLICATIONS, Sensors and actuators. A, Physical, 70(1-2), 1998, pp. 42-47
ULTRASONIC FLEXURAL LAMB-WAVE ACTUATORS BASED ON PZT THIN-FILM
Authors: LUGINBUHL P COLLINS SD RACINE GA GRETILLAT MA DEROOIJ NF BROOKS KG SETTER N
Citation: P. Luginbuhl et al., ULTRASONIC FLEXURAL LAMB-WAVE ACTUATORS BASED ON PZT THIN-FILM, Sensors and actuators. A, Physical, 64(1), 1998, pp. 41-49
MICROFABRICATED LAMB WAVE DEVICE BASED ON PZT SOL-GEL THIN-FILM FOR MECHANICAL TRANSPORT OF SOLID PARTICLES AND LIQUIDS
Authors: LUGINBUHL P COLLINS SD RACINE GA GRETILLAT MA DEROOIJ NF BROOKS KG SETTER N
Citation: P. Luginbuhl et al., MICROFABRICATED LAMB WAVE DEVICE BASED ON PZT SOL-GEL THIN-FILM FOR MECHANICAL TRANSPORT OF SOLID PARTICLES AND LIQUIDS, Journal of microelectromechanical systems, 6(4), 1997, pp. 337-346
ATOMIC-FORCE MICROSCOPY USING CANTILEVERS WITH INTEGRATED TIPS AND PIEZOELECTRIC LAYERS FOR ACTUATION AND DETECTION
Authors: INDERMUHLE PF SCHURMANN G RACINE GA DEROOIJ NF
Citation: Pf. Indermuhle et al., ATOMIC-FORCE MICROSCOPY USING CANTILEVERS WITH INTEGRATED TIPS AND PIEZOELECTRIC LAYERS FOR ACTUATION AND DETECTION, Journal of micromechanics and microengineering, 7(3), 1997, pp. 218-220
FABRICATION AND CHARACTERIZATION OF CANTILEVERS WITH INTEGRATED SHARPTIPS AND PIEZOELECTRIC ELEMENTS FOR ACTUATION AND DETECTION FOR PARALLEL AFM APPLICATIONS
Authors: INDERMUHLE PF SCHURMANN G RACINE GA DEROOIJ NF
Citation: Pf. Indermuhle et al., FABRICATION AND CHARACTERIZATION OF CANTILEVERS WITH INTEGRATED SHARPTIPS AND PIEZOELECTRIC ELEMENTS FOR ACTUATION AND DETECTION FOR PARALLEL AFM APPLICATIONS, Sensors and actuators. A, Physical, 60(1-3), 1997, pp. 186-190
SELF-SHARPENING TIP INTEGRATED ON MICRO CANTILEVERS WITH SELF-EXCITING PIEZOELECTRIC SENSOR FOR PARALLEL ATOMIC-FORCE MICROSCOPY
Authors: INDERMUHLE PF SCHURMANN G RACINE GA DEROOIJ NF
Citation: Pf. Indermuhle et al., SELF-SHARPENING TIP INTEGRATED ON MICRO CANTILEVERS WITH SELF-EXCITING PIEZOELECTRIC SENSOR FOR PARALLEL ATOMIC-FORCE MICROSCOPY, Applied physics letters, 70(17), 1997, pp. 2318-2320
PIEZOELECTRIC CANTILEVER BEAMS ACTUATED BY PZT SOL-GEL THIN-FILM
Authors: LUGINBUHL P RACINE GA LERCH P ROMANOWICZ B BROOKS KG DEROOIJ NF RENAUD P
Citation: P. Luginbuhl et al., PIEZOELECTRIC CANTILEVER BEAMS ACTUATED BY PZT SOL-GEL THIN-FILM, Sensors and actuators. A, Physical, 54(1-3), 1996, pp. 530-535
GROWTH AND STRUCTURAL-PROPERTIES OF EPITAXIAL PB(ZRXTI1-X)O-3 FILMS AND PB(ZRXTI1-X)O-3-CUPRATE HETEROSTRUCTURES
Authors: TRISCONE JM FRAUCHIGER L DECROUX M MIEVILLE L FISCHER O BEELI C STADELMANN P RACINE GA
Citation: Jm. Triscone et al., GROWTH AND STRUCTURAL-PROPERTIES OF EPITAXIAL PB(ZRXTI1-X)O-3 FILMS AND PB(ZRXTI1-X)O-3-CUPRATE HETEROSTRUCTURES, Journal of applied physics, 79(8), 1996, pp. 4298-4305
PZT FILMS FOR MICRO-PUMPS
Authors: BROOKS K DAMJANOVIC D KHOLKIN A REANEY I SETTER N LUGINBUHL P RACINE GA DEROOIJ NF SAAMAN A
Citation: K. Brooks et al., PZT FILMS FOR MICRO-PUMPS, Integrated ferroelectrics, 8(1-2), 1995, pp. 13-23
HYBRID ULTRASONIC ELASTIC FORCE MOTORS MICROMACHINED IN SILICON
Authors: RACINE GA LUTHIER R LUGINBUHL P BROOKS K SETTER N DEROOIJ NF
Citation: Ga. Racine et al., HYBRID ULTRASONIC ELASTIC FORCE MOTORS MICROMACHINED IN SILICON, Integrated ferroelectrics, 8(1-2), 1995, pp. 25-34
PIEZOELECTRIC POSITION SENSOR FOR ULTRASONIC EFM MOTORS
Authors: RACINE GA LUTHIER R DEROOIJ NF
Citation: Ga. Racine et al., PIEZOELECTRIC POSITION SENSOR FOR ULTRASONIC EFM MOTORS, Sensors and actuators. A, Physical, 42(1-3), 1994, pp. 661-665
Risultati: 1-12 |