Authors:
KORZEC D
RAIKO V
ENGEMANN J
GUNZEL R
BRUTSCHER J
MOLLER W
Citation: D. Korzec et al., APPLICATION OF THE ECR SLOT ANTENNA PLASMA SOURCE FOR ION-IMPLANTATION, Surface & coatings technology, 93(2-3), 1997, pp. 217-224
Authors:
RAIKO V
SPITZL R
ENGEMANN J
BORISENKO V
BONDARENKO V
Citation: V. Raiko et al., MPCVD DIAMOND DEPOSITION ON POROUS SILICON PRETREATED WITH THE BIAS METHOD, DIAMOND AND RELATED MATERIALS, 5(10), 1996, pp. 1063-1069