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Authors:
RAUPP GB
NICO JA
ANNANGI S
CHANGRANI R
ANNAPRAGADA R
Citation: Gb. Raupp et al., 2-FLUX RADIATION-FIELD MODEL FOR AN ANNULAR PACKED-BED PHOTOCATALYTICOXIDATION REACTOR, AIChE journal, 43(3), 1997, pp. 792-801
Citation: M. Virmani et al., FEATURE SCALE SIMULATION STUDIES OF TEOS-SOURCED REMOTE MICROWAVE PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION OF SILICON DIOXIDE - ROLE OF OXYGEN-ATOM RECOMBINATION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(3), 1996, pp. 977-983
Citation: Gb. Raupp, PHOTOCATALYTIC OXIDATION FOR POINT-OF-USE ABATEMENT OF VOLATILE ORGANIC-COMPOUNDS IN MICROELECTRONICS MANUFACTURING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(4), 1995, pp. 1883-1887
Citation: Gb. Raupp et al., CONFORMALITY OF SIO2-FILMS FROM TETRAETHOXYSILANE-SOURCED REMOTE MICROWAVE PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 676-680
Citation: Gb. Raupp et al., PREDICTING INTRAWAFER FILM THICKNESS UNIFORMITY IN AN ULTRALOW PRESSURE CHEMICAL-VAPOR-DEPOSITION REACTOR, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 11(6), 1993, pp. 3053-3061
Authors:
CALE TS
PARK JH
GANDY TH
RAUPP GB
JAIN MK
Citation: Ts. Cale et al., STEP COVERAGE PREDICTIONS USING COMBINED REACTOR SCALE AND FEATURE SCALE MODELS FOR BLANKET TUNGSTEN LPCVD, Chemical engineering communications, 119, 1993, pp. 197-220
Citation: Cl. Pillote et al., CHARACTERIZATION OF PHOSPHOSILICATE GLASS-FILMS OBTAINED USING PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION FROM TETRAETHYLORTHOSILICATE AND TRIMETHYLPHOSPHITE, Thin solid films, 236(1-2), 1993, pp. 287-293