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Citation: F. Ren et al., DRY ETCH DAMAGE IN GAAS METAL-SEMICONDUCTOR FIELD-EFFECT TRANSISTORS EXPOSED TO INDUCTIVELY-COUPLED PLASMA AND ELECTRON-CYCLOTRON-RESONANCEAR PLASMAS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(4), 1997, pp. 983-989
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