Authors: GORBATKIN SM POKER DB RHOADES RL DOUGHTY C BERRY LA ROSSNAGEL SM

Citation: Sm. Gorbatkin et al., CU METALLIZATION USING A PERMANENT-MAGNET ELECTRON-CYCLOTRON-RESONANCE MICROWAVE PLASMA SPUTTERING HYBRID SYSTEM/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(3), 1996, pp. 1853-1859

Authors: RHOADES RL GORBATKIN SM

Citation: Rl. Rhoades et Sm. Gorbatkin, CHARACTERIZATION OF AR CU ELECTRON-CYCLOTRON-RESONANCE PLASMAS USING OPTICAL-EMISSION SPECTROSCOPY/, Journal of applied physics, 80(5), 1996, pp. 2605-2613

Authors: BERRY LA GORBATKIN SM RHOADES RL

Citation: La. Berry et al., CU DEPOSITION USING A PERMANENT-MAGNET ELECTRON-CYCLOTRON-RESONANCE MICROWAVE PLASMA SOURCE, Thin solid films, 253(1-2), 1994, pp. 382-385

Authors: GORBATKIN SM RHOADES RL TSUI TY OLIVER WC

Citation: Sm. Gorbatkin et al., HARD BORON-OXIDE THIN-FILM DEPOSITION USING ELECTRON-CYCLOTRON-RESONANCE MICROWAVE PLASMAS, Applied physics letters, 65(21), 1994, pp. 2672-2674

Authors: RHOADES RL GORBATKIN SM

Citation: Rl. Rhoades et Sm. Gorbatkin, SPATIAL PROFILING OF ION AND NEUTRAL EXCITATION IN NOBLE-GAS ELECTRON-CYCLOTRON-RESONANCE PLASMAS, Applied physics letters, 65(16), 1994, pp. 2004-2006

Authors: SHON JW RHOADES RL VERDEYEN JT KUSHNER MJ

Citation: Jw. Shon et al., SHORT-PULSE ELECTRON-BEAM EXCITATION OF THE HIGH-PRESSURE ATOMIC NE-LASER, Journal of applied physics, 73(12), 1993, pp. 8059-8065