Authors:
ROGACHEV NA
KUZNETSOV AN
TRAPEZNIKOVA IN
TERUKOV EI
CHELNOKOV VE
Citation: Na. Rogachev et al., AMORPHOUS HYDROGENATED SILICON-CARBIDE PRODUCED BY MAGNETRON REACTIVESPUTTERING, Semiconductors, 28(8), 1994, pp. 776-778
Authors:
ROGACHEV NA
KUZNETSOV AN
TERUKOV EI
LEBEDEV AA
CHELNOKOV VE
Citation: Na. Rogachev et al., CHARACTERISTICS OF THE GROWTH OF SILICON- CARBIDE EPITAXIAL LAYERS FROM GAS-PHASE PRODUCED BY MAGNETOTRON REACTIVE SPUTTERING, Pis'ma v Zurnal tehniceskoj fiziki, 20(7), 1994, pp. 51-54